Various Parameters of the Flowing Part of a Cylindrical Molecular Vacuum Pump Effecting on Its Characteristics

Abstract

In the context of modern industry the molecular vacuum pumps (MVP) are widely used. The analyzed current market of vacuum technology enables drawing a conclusion that this equipment holds one of the leading positions among the high-vacuum facilities of pumping due to their advantages such as insensitivity to the atmosphere breakthrough, ability to pump out heavy gases quickly, rapid start-up time, and oil-free pumping.

The earlier developed authors’ mathematical model and calculation program are used to assess the influence efficiency of the key geometrical parameters of flowing part of the cylindrical molecular pump on its main characteristics. The obtained dependences allow us to solve a relevant, but not completely resolved as yet problem of optimizing the high-vacuum pumping facilities in case of their operation in a wide range of pressures on the suction side.

The paper presents graphs of the pumping speed and ratio of the cylindrical vacuum molecular pump pressures versus various parameters of the flowing part, such as the angle of inclination of the helix, the relative diameter and the number of helical starts. Conclusions are drawn.